DNS (Screen) wafer dryer lamp
On the 300mm line, the oven looks stable, but the photoresist profile still drifts after soft bake. Then you get line-width excursions at etch, and...
High efficiency wafer dryer bulb
On the fab floor, you know the drill. A ±0.5°C drift during the photoresist bake is enough to scrap a 500-wafer lot. You need heat that lands exactly...