Fab air conditioning heater module

Fri, 03 Jul 2026 02:30:04 +0800

On a 300mm line, the lithography bay is the heartbeat. If the AHU heater drifts, the bake profile drifts with it—and you start bleeding yield long before the defect scanner flags anything. We built our Fab Air Conditioning Heater Module to keep the thermal field stable where it counts: right at the wafer. What matters under the hood We hold ±0.1°C thermal uniformity across the supply air stream, so the bake plate sees repeatable inlet conditions. It runs in Class 1–100 cleanrooms with zero particle generation, confirmed by in-situ particle monitoring. The heater uses low-outgassing materials and a sealed thermal path, so you don’t introduce contamination during soft bake and hard bake. The output is sized for 24/7 operation with controlled ramp rates, and it drops into existing AHU control loops through standard industrial interfaces. Here’s the thing: photoresist bake isn’t a coarse step—it’s a dimensional boundary. Even a small temperature ripple shows up as critical dimension variation and edge-bead non-uniformity. We hold room temperature at the wafer plane so the bake recipe behaves the same lot after lot. You get tighter CD control, fewer reworks, and a predictable thermal budget. Efficiency improves too, because you stop wasting energy on overshoot-and-correct cycles. Installation needs attention to airflow direction and static pressure tolerances of the AHU; mismatched ducting creates micro-turbulence that chews into uniformity. The module also needs a clean power feed—voltage ripple translates into short-term temperature jitter. Plan the commissioning window with your lithography bake tracks and validate the profile against your specific resist stack.

Zoned infrared heating module

Thu, 18 Jun 2026 00:39:20 +0800

On the fab floor, soft bake and hard bake aren’t just temperature steps—they’re tolerance steps. A 1°C drift eats into your critical dimension budget, and a hotspot can quietly kill yield. That’s why we built zoned infrared heating modules to take the guesswork out of the thermal profile. What matters, technically We run short-wave infrared emitters with fast-response drivers, so the heat lands where you want it, when you want it. The module is split into independently controlled zones, which means you tune temperature across the wafer instead of averaging it across a hotplate. In practice, that gives wafer-level uniformity within ±0.1°C and photoresist bake profiles that track within ±0.5°C setpoint, cycle after cycle. The quartz-free build and low-outgassing materials keep particle generation off the wafer, which is exactly what you need for Class 1–100 cleanroom operation. Here’s why it holds up in a lithography line. You can’t afford unplanned downtime. This zoned infrared module runs 7×24 with zero unplanned stops, and the thermal system is built to last—service life exceeds 10,000 hours. It’s simple, modular, and controlled at the zone level. The payoff is straightforward. You get faster ramp-to-setpoint, tighter within-batch repeatability, and fewer scrap wafers tied to bake non-uniformity. Energy use drops, too—zoned control avoids heating the whole block when only a few positions need adjustment. A few things to plan for. Installation needs a dedicated power circuit and clean, cool airflow to keep emitter temperature stable. The module interfaces cleanly with existing bake tracks, but you get the full benefit when you pair it with a recipe strategy that uses zone compensation for edge effects. One constraint is real: zone count is fixed per frame. So map the zones upfront to match your wafer sizes and edge-control needs.

Module on Cozy Outdoor Patio IR Comfort

Fab air conditioning heater module

Zoned infrared heating module